First, vacuum: an atmospheric pressure =101Kpa=0.1Mpa
Two, vacuum furnace type:
1. The square electric furnace uses a mechanical pump to vacuum, and the vacuum degree can reach -0.1Kpa, leaving 1000Pa
2, circular electric furnace using mechanical pump vacuum, vacuum degree up to -0.01Kpa, remaining 100Pa
Vacuum furnace: round more stable, high vacuum: curved surface
Third, vacuum unit: composed of a number of pumps
1. The circular furnace uses Roots unit (mechanical pump + Roots pump), and the vacuum degree is less than 10Pa
2, high vacuum molecular pump unit: mechanical pump + Roots pump + molecular pump (6.7*10-3=0.000067Pa)
3, diffusion pump unit: mechanical pump + Roots pump + diffusion pump
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